Month of May 2002

Extreme ultraviolet lithography (EUVL) is a leading next generation lithography technology. The mask blank for EUVL consists of a low thermal expansion material substrate having a square photomask form factor (SEMI Standard P-37) that is coated with Mo/Si multilayers. One of the challenges in implementing EUVL is to...

Most physical vapor deposition (PVD) systems have a planar target positioned above the wafer. The target is negatively biased to induce ion sputtering and generate deposition precursors. There are two problems associated with the deposition performance in the wafer edge region of such a system. The first problem is...

When fabricating semiconductor devices, within-wafer uniformity is an important parameter to control. This is especially true for 300mm wafers, since uniformity is harder to produce over an area 2.25 times larger than 200mm wafers. This improvement is targeted for high-density plasma (HDP) chemical vapor deposition...

Single-sided flexible circuits are presently sol- dered directly onto a printed circuit board (PCB) with solder portions that are typically cladded with copper. However, such solder portions may not be sufficiently strong to form reliable connections with the PCB as, conventionally, flexible circuits are thin.

Although more cost effective than its predecessor, iDEN CallMode cannot be connected to more than one Transcoder BSC. A therefore, results in the loss of service to all sites in this paper, we propose a change to the existing BSUEBTS resource alloca- tion scheme, which would facilitate Mode while also providing a...

Surface quality inspection for visual/mechanical defects (e.g., molded package voids, pits, and cracks) is expensive and slows the production throughput rate. This invention/technique provides a rapid, low-cost means of performing surface quality verification. The principle of the AudioTactile invention is as follows:...

When using a subscriber unit, it is possible to record the keystrokes for later use to redial. However, current subscriber unit merely record the sequence of key strokes without preserving any information regarding the interval between key strokes, or intervals before an additional dual tones multifrequency (DTMF)...

Harmonic filters are used in two-way commtmi- cations technology to reject spurious emissions/ harmonics (harmonics are always the multiple of the carrier frequency). The spurious emissions occur with the generation of the transmitter frequency. These filters are built up in-between the transmitter output stage and...

Electronic filters are used to remove noise from an input signal. In some applications, such as disk or tape drive read channels, the filter must not distort the shape of the original signal. This is accomplished with lowpass filters such as the Butterworth, Bessel, Chebychev filters and others, which have been used...

Caller ID is a telephone service whereby infor- mation, such as a calling party's number or date and time of a call, is embedded in the ringing cycle of an incoming call. By decoding the information at a receiving end, a receiving party is able to identify the calling party and the time at which calls are made.